Lecture Material

Electron Beam Lithography Training (ppt)

Video

Electron Beam Lithography Training Video

Step by Step Instructions

CAD file instructions:

AutoCAD Quick Start Instructions
how to make a racetrack shape in AutoCAD
Layout BEAMER Instructions
linkCAD Quick Start Instructions
JBX FILER Operating Instructions


Job creation:

Job Deck and Schedule File Instructions
Schd and Array Check Instructions
Actual Shot Display Instructions


9300 Operation:

ALD and Exposure Operating Instructions


Unix help:

Basic UNIX Instructions

Equipment Manuals

The manuals are located on grover website under Text Instructions for the JEOL JBX-9300FS. You must have been given buzzcard access to the tool, and it requires password. Click links below to go there.

Equipment Manuals
Cassettes

Tutorials

Proper focus & height adjustment
Proximity Effect in E-beam Lithography (Click here for pdf)
Effect of different substrates on base dose
Wikipedia: Electron Beam Lithography