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Users wishing to image their patterns using an SEM have the following choices at Georgia Tech: Hitachi 3500H Thermionic SEM This SEM is located in the MiRC clean room. Since it is thermionic, it does not have as high a resolution as field emission SEM's. However, under certain conditions, this SEM can be quite useful for pattern features less than 100nm, and often times users too quickly dismiss its capability. Zeiss Ultra 60 SEM This SEM is located on the first floor of the MiRC. It is a field emission SEM with 1nm resolution at 15kV. LEO 1530 Field Emission SEM This SEM is located in the IPST building and is part of the Center For Nanostructure Characterization & Fabrication in the School of Materials Science and Engineering. Training for this instrument is offered by the MSE department and users are expected to already have SEM experience. If you do not yet have SEM experience, you should get trained on the MiRC Hitachi 3500H first. LEO 1550 Field Emission SEM This SEM is located in the IPST building and is part of the Center For Nanostructure Characterization & Fabrication in the School of Materials Science and Engineering. Training for this instrument is offered by the MSE department and users are expected to already have SEM experience. If you do not yet have SEM experience, you should get trained on the MiRC Hitachi 3500H first.