|
|
|
|
|
|
PMMA Process
1. 60sec spincoat PMMA (see PMMA spin speed curves)
2. 180C hotplate for 90sec
3. expose (650uC/cm2 base dose for features larger than 1um)
4. 2min immersion develop 1:1 MIBK:IPA
5. rinse IPA
To remove PMMA:
1. soak in Acetone
OR
2. O2 plasma
for metal liftoff process:
1. soak in Acetone 5 - 15 min
2. flow Acetone over wafer using squeeze bottle to remove large pieces of metal
3. place in fresh Acetone in a container and float in ultrasonic bath for 5 - 15 min
|
