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Presentations:
Workshops:
Publications by Nanolithography Group:
6. N.R.Devlin, D.K.Brown, P.Kohl, "Patterning decomposable polynorbornene with electron beam lithography to create nanochannels" Journal of Vacuum Science
Technology B, to be published Nov/Dec 2009.
5. D.K.Brown, "Direct patterning of plasma enhanced chemical vapor deposition silicon dioxide by electron beam lithography" Journal of Vacuum Science
Technology B 26(6), Nov/Dec 2008, 2451.
4. D.K.Brown, "Deep ultraviolet photolithography capability of ZEP520A electron beam resist for mix and match lithography" Journal of Vacuum Science
Technology B 25(6), Nov/Dec 2007, 2447.
3. R. Murali, D.K. Brown, K.P. Martin, J.D. Meindl, “Improving electron beam resist sensitivity by preexposure to deep ultraviolet radiation,” Journal of Vacuum Science and Technology B, vol. 25, no. 6, pp. 2064-2067, Dec. 2007.
2. R.Murali, D.K.Brown, K.P.Martin, J.D.Meindl, "Process optimization and proximity effect correction for gray scale e-beam lithography," Virtual Journal of Nanoscale Science &
Technology, December 11, 2006. (Originally published in of Journal of Vacuum Science & Technology B 24, 2936, 2006)
1. Momeni, B.; Soltani, M.; Askari, M.; Brown, D.K.; Adibi, A., “Ultra-compact preconditioned superprism-based photonic crystal demultiplexers”, 2005 IEEE LEOS Annual Meeting, p 198-9, 2005
Select Publications by users of Nanolithography Facility:
5. J. Perng,
"High Aspect-Ratio Nanoscale Etching in Silicon using Electron beam lithography and Deep Reactive ion Etching(DRIE) Technique," Georgia Institute of Technology, M.S. Dissertation, Aug. 2006. The defense presentation is available here .
4. C. Berger et al., “Electronic Confinement and Coherence in Patterned Epitaxial Graphene,” Science Express, Published Online April 13, 2006
3. B. Momeni et al., “Compact wavelength demultiplexing using focusing negative index photonic crystal superprisms,” Optics Express, Vol. 14 No. 6, pp. 2413-2422, 20 March 2006
2. T. Yamashita, “Unraveling Photonic Bands: Characterization of Self-Collimation Effects in Two-Dimensional Photonic Crystals,” Georgia Institute of Technology Ph.D. Dissertation, 24 May 2005
1. K. Klein et al., “Array of Nano-Cantilevers as a Bio-Assay for Cancer Diagnosis,” IEEE 2005 Electronic Components and Technology Conference, pp. 583-587
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