2007 Electron Beam Lithography Technical Forum

Georgia Institute of Technology
February 7th and 8th, 2007
Atlanta, Georgia

A technical forum was held at Georgia Tech to review electron beam lithography capabilities and state of the art research amongst the various National Nanofabrication Infrastructure Network (NNIN) sites.



Attendees (from left to right): Devin Brown (GT), Dong Qin (UW), Tim Brock (UMich), Marylene Palard (UT-Austin), JD Deng (Harvard), Raghu Murali (GT), Bill Mitchell (UCSB), Alan Bleier (Cornell), Michael Rogosky (Penn State), Kevin Roberts (UMinn), Mary Tang (Stanford), John Treichler (Cornell), Greg Book (GT), Greg Allion (UMich).